ISSN:
1662-9752
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Microlens arrays are widely used as critical components in a large number of photonicsand telecommunication products. The increasing demand for high-tech products provides anexpanding room for the development of the micro-fabrication technology. This study presents a toolcompensation for correcting the form error of fabricated microlenses in ultra-precision machiningwith fast-tool-servo (FTS) system. After presentation of optimal cutting conditions deduced on thebasis of cutting experiments of microlens arrays, a tool radius compensation method will be proposedand evaluated in this paper. This methodology makes use of form measurement data from a FormTalysurf system to modify the C program employed in the software of ultra-precision machining FTSsystem – SOP. The form error was successfully reduced after implementation of tool compensation
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/02/14/transtech_doi~10.4028%252Fwww.scientific.net%252FMSF.532-533.689.pdf