ISSN:
1013-9826
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
As an alternative for producing the meter-size diffraction grating demanded in manytechnical field, grating mosaic requires positional detection with accuracy of sub-microns. In thispaper, we propose a positional detection method based on image processing of three far-fielddiffraction intensity patterns in two wavelengths. With a set of detailed adjustment steps deducedfrom theoretical analysis, we successfully detected and separated the two positional errors.Moreover, with the three patterns we enlarged the target range of coarse adjustment required forfurther fine adjustment in longitudinal position. We achieved positional detection sensitivity of lessthan 14 nm, and diagnosed the alignment with the far-field pattern in a third wavelength
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/57/transtech_doi~10.4028%252Fwww.scientific.net%252FKEM.381-382.291.pdf
