ISSN:
1013-9826
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Measuring grating profiles is very helpful for the analysis of specifications of gratingsand improvement of grating fabrication techniques. We analyzed grating grooves by digitizing thescanning-electron microscope (SEM) images. Some kinds of filter and arithmetic were developed toextract the contour line of grating profile. In order to analyze the diffraction efficiency affected bythe shape of grating profile, the calculated diffraction efficiency based on the SEM image andmeasured diffraction efficiency based on experiment was compared and analyzed
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/57/transtech_doi~10.4028%252Fwww.scientific.net%252FKEM.381-382.299.pdf
