ISSN:
1551-2916
Source:
Blackwell Publishing Journal Backfiles 1879-2005
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
Notes:
The oxidation of ruthenium using rapid thermal processing (RTP) was investigated by thermogravimetric analysis. Ruthenium single-crystal particles with 10 µm diameter were used in the present study. The result showed that the early stage of RTP was controlled primarily by the oxygen diffusion process through the RuO2 reacted layer.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1111/j.1151-2916.1998.tb02665.x