ISSN:
1551-2916
Source:
Blackwell Publishing Journal Backfiles 1879-2005
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
Notes:
Local laser-induced oxidation of thin titanium films on glass is shown to be self-limiting due to a decrease in the absorptivity during the reaction. Taking advantage of this confinement, stable writing of transparent oxide line structures narrower than the diffraction-limited focused spot of a continuous wave Ar ion laser (500 nm) has been accomplished. The greatest optical contrast (1:10) with the highest resolution down to 165 nm was observed if the film thickness is of the order of the light absorption length in the metal.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1111/j.1151-2916.1997.tb03035.x
