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Si/C phases from the IR laser-induced decomposition of divinylsilane (1998)

Dřínek, Vladislav ; Bastl, Zdeněk ; Šubrt, Jan ; [et al.]

New York, NY [u.a.] : Wiley-Blackwell

Applied Organometallic Chemistry 12 (1998), S. 427-433

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ISSN: 0268-2605

Keywords: laser ; chemical vapour deposition ; thin films ; Si/C/H materials ; divinylsilane ; silicon carbide ; polycarbosilane ; Chemistry ; Industrial Chemistry and Chemical Engineering

Source: Wiley InterScience Backfile Collection 1832-2000

Topics: Chemistry and Pharmacology

Notes: Transversely excited atmospheric (TEA) CO2 laser-induced decomposition of divinylsilane in the gas phase yields unsaturated C2-C4 hydrocarbons, benzene and vinylsilane, and it represents a convenient process for chemical vapour deposition of thin solid films composed of silicon carbide and polycarbosilane. © 1998 John Wiley & Sons, Ltd.

Additional Material: 8 Ill.

Type of Medium: Electronic Resource

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