ISSN:
1432-1858
Source:
Springer Online Journal Archives 1860-2000
Topics:
Electrical Engineering, Measurement and Control Technology
,
Technology
Notes:
Abstract The study deals with the manufacture of diffraction grating by applying the ultraprecision microgrooving technology. Microgrooving is performed by the use of a lathe-type ultraprecision milling machine having 1 nm positioning accuracy, together with a rotating diamond cutter. As an example of microgroove, a diffraction grating with 32 768 V-shaped grooves is fabricated in a pitch of 1 μm and a depth of 0.5 μm around the circumference of copper disk of 12 mm in diameter. The high-speed rotating cutter allows the microgrooves to be sharply machined without burrs and accumulative pitch errors, taking account of cutting order. The surface roughness of machined grooves is 1 nm (Ra), which experimentally shows good optical properties.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/s005420050156
