ISSN:
1432-1858
Source:
Springer Online Journal Archives 1860-2000
Topics:
Electrical Engineering, Measurement and Control Technology
,
Technology
Notes:
Abstract The present study is focused on the development of a gas sensor for application in a high temperature environment. The sensor has been realised using thin films prepared on silicon substrates including a high temperature stable heating and wiring system. TiO2 acts as sensitive layer. Measurements have been carried out in synthetic gas mixtures as well as in gases in a given application. Neural networks and multivariate data analysis have been used for determining the gas concentrations. The capability to detect CO, NO x , and toluene is shown.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/s005420000048