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Nanofabrication of a two-dimensional array using laser-focused atomic deposition (1995)

Gupta, R. ; McClelland, J. J. ; Jabbour, Z. J. ; [et al.]

Woodbury, NY : American Institute of Physics (AIP)

Applied Physics Letters 67 (1995), S. 1378-1380

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ISSN: 1077-3118

Source: AIP Digital Archive

Topics: Physics

Notes: Fabrication of a two-dimensional array of nanometer-scale chromium features on a silicon substrate by laser-focused atomic deposition is described. Features 13±1 nm high and having a full-width at half maximum of 80±10 nm are fabricated in a square array with lattice constant 212.78 nm, determined by the laser wavelength. The array covers an area of approximately 100 μm×200 μm. Issues associated with laser-focusing of atoms in a two-dimensional standing wave are discussed, and potential applications and improvements of the process are mentioned.

Type of Medium: Electronic Resource

URL: http://dx.doi.org/10.1063/1.115539

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