Electronic Resource
Woodbury, NY
:
American Institute of Physics (AIP)
Applied Physics Letters
64 (1994), S. 2812-2814
ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
The texture of vapor deposited parylene (poly-p-xylylene) thin films on Si is measured using the x-ray pole figure technique to quantify the crystalline portion. The as-deposited sample is the monoclinic α phase where the (020) fiber texture component comprises 48% and the remaining 52% are randomly oriented crystallites. The sample annealed for 350 °C 12 h is hexagonal β phase with an (040) fiber texture component of 68%. The half-width (ω) of the (040) fiber component of the β crystallites is within 25° of the substrate normal (fiber axis). In a β(040) oriented crystallite, the polymer chain is parallel to the Si substrate. This β fiber texture develops by polymer chain movement and rearrangement of the as-deposited α fiber texture.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.111433
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