Electronic Resource
[S.l.]
:
American Institute of Physics (AIP)
Journal of Applied Physics
69 (1991), S. 1147-1150
ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
A method for ultraclean radioactive marking is presented, utilizing the process of nuclear stimulated desorption. It employs a sequence of two slow radioactive decays. The primary decay causes a nucleus to desorb from a substrate onto which it had been placed. The desorbing daughter nuclei, being themselves radioactive, then constitute an ultraclean marking flux. A manifestation of this mechanism for the special case of the 47Ca→47Sc→47Ti decay is described. An application to end-point detection in wet etching is presented and quantitatively simulated.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.347295
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