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  • 1
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 69 (1991), S. 1147-1150 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: A method for ultraclean radioactive marking is presented, utilizing the process of nuclear stimulated desorption. It employs a sequence of two slow radioactive decays. The primary decay causes a nucleus to desorb from a substrate onto which it had been placed. The desorbing daughter nuclei, being themselves radioactive, then constitute an ultraclean marking flux. A manifestation of this mechanism for the special case of the 47Ca→47Sc→47Ti decay is described. An application to end-point detection in wet etching is presented and quantitatively simulated.
    Type of Medium: Electronic Resource
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