ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
In this article, a new curve of the correction factor for the measurement of sheet resistance of a square sample with a square four-point probe is presented by using the theory of conformal transformation. This curve is quite different from that obtained by using the theory of infinite dipoles. An experimental curve is recommended to use. The function of the conformal transformation used in this article is simple and can be easily used for solving the problem of boundary effect of current field. The theoretical curve is suitable to the boundary areas of wafers.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1143608