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Digitale Medien

Grazing incidence optics for soft x-ray microscopy : Proceedings of the 4th international conference on synchrotron radiation instrumentation (1992)

Voss, J. ; Kunz, C. ; Moewes, A. ; [weitere]

[S.l.] : American Institute of Physics (AIP)

Review of Scientific Instruments 63 (1992), S. 569-573

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Details

ISSN: 1089-7623

Quelle: AIP Digital Archive

Thema: Physik , Elektrotechnik, Elektronik, Nachrichtentechnik

Notizen: We have developed and brought into operation a new type of scanning soft x-ray microscope basing on a grazing incidence mirror. A ring shaped ellipsoidal mirror serves as a nonimaging but concentrating optical element to produce a microfocus. The specimen is mechanically scanned, and the image is recorded a pixel at a time. Transmission, total photoelectron yield, photoelectron spectroscopy, fluorescence, and stimulated desorption of ions and neutrals can provide information in the range of photon energies between 20 and 1300 eV. While the smallest spatially resolved structure, limited by the mirror imperfections, has a size of 0.4 μm, the minimum diameter of selected areas necessary for photoelectron microspectroscopy presently is about 4 μm.

Materialart: Digitale Medien

URL: http://dx.doi.org/10.1063/1.1142707

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