Title:
Two-Dimensional Adaptive Simulation of Dopant Diffusion in Silicon /; ZIB-Report 00-03
Author:
Lang, Jens
Contributer:
Merz, Wilhelm
Publisher:
Berlin :Konrad-Zuse-Zentrum für Informationstechnik,
Year of publication:
2000
Pages:
16 S.
Series Statement:
ZIB-Report ZIB-Report 00-03
ISSN:
1438-0064
Type of Medium:
Book
Language:
English
URL:
http://opus.kobv.de/zib/volltexte/2000/572/