Electronic Resource
Woodbury, NY
:
American Institute of Physics (AIP)
Applied Physics Letters
68 (1996), S. 1784-1786
ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
Ion beam synthesized iron silicide (FeSi2) (200 keV, 350 °C, 4×1017 Fe+/cm2) was studied by transmission electron microscopy. Face-centered cubic FeSi2 (γ phase) was observed in the as-implanted sample and the samples annealed at temperatures up to 600 °C. It is suggested that the formation of the equilibrium semiconducting FeSi2 (β phase) is preceded via a transition γ phase due to its better lattice match with the silicon matrix. The absence of metallic FeSi2 (α phase) can be attributed to the high iron dose implantation. © 1996 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.116666
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