Electronic Resource
Woodbury, NY
:
American Institute of Physics (AIP)
Applied Physics Letters
62 (1993), S. 2790-2791
ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
Aluminum nitride films were synthesized by electron gun (e-gun) evaporation of aluminum onto Si(111) wafer and glassy carbon, with simultaneous bombardment by 5–20 keV nitrogen ions. Under specific experimental conditions, polycrystalline AlN films of fine crystallinity were obtained by this method. The correlation between experimental parameters and the resulted structure as well as the stoichiometry of the AlN films is also discussed.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.109210
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