ISSN:
1573-4803
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Abstract SiC-C nano-composites covering every possible combination of carbon and SiC were prepared by chemical vapour deposition. The specific compositions of the deposits were controlled by changing the Si/C molar ratio in the source gases at deposition temperatures (T dep) of 1673 to 1873 K and total gas pressures (P tot) of 6.7 to 40 k Pa using the SiCl4-C3H8-H2 system. The prediction, based on the thermodynamic calculation on composition, morphology and deposition rate, was compared with experimental results. The optimal deposition conditions predicted by the calculations were nearly in agreement with the experimental results.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF01129914
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