ISSN:
1432-0630
Keywords:
81.40.-Z
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
Notes:
Abstract The dependence of the ablation rate of various materials on the laser spot diameter on the sample surface has been investigated. The experiments have been performed with excimer lasers at the wavelengths 193, 248 and 308 nm. Polymers, aluminum oxide ceramics, and glasses have been ablated under vacuum and ambient atmosphere conditions. In general, all materials show a more or less pronounced increase of the ablation rate with decreasing spot diameter in the range of 10–200 μm if pulses with nanosecond pulse durations are applied. For ultrashort pulses (500 fs) at 248 nm this diameter dependence is not observed. The expansion of the ablation plume over areas of different size seems to be the main reason for this effect.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF01577606
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