ISSN:
1013-9826
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
The uniform distribution and the stability of the substrate temperature are the mostimportant factors that deeply affect the quality and the growth rate of diamond films. In this paper,cemented carbide cutters were chosen for substrates, the 3D finite element (FE) model of filamentsand substrates was developed in ANSYS 8.0, the calculated results show that the substratetemperature is influenced by the filament temperature, filaments diameter, the quantity of thefilaments and the distance between the filaments and the substrates. The 3D finite element model offilaments and substrates also provides a basis for selecting the parameters to obtain uniform diamondfilms in miniature EACVD system
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/57/transtech_doi~10.4028%252Fwww.scientific.net%252FKEM.375-376.525.pdf
Permalink