ISSN:
1013-9826
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Diamond film was deposited on spherical molybdenum substrate by DC arc plasma CVDmethod. Diamond film morphology, purities and orientation evolution, obtained from atomic forcemicroscopy, scanning electron microscopy, Raman spectroscopy, X ray diffraction respectively, hasshowed that grains on the growth surface are compact, continuous and uniform. Characteristicdiamond (111), (220), (311) peaks were found and (111) facets were predominant. It revealed thatdiamond film was polycrystalline texture characteristic. There is a typical diamond Raman spectrumpeaks at 1332.0 cm-1, and not graphite and amorphous carbon characteristic peak. High puritydiamond film was deposited. When methane concentration was increased, diamond film has morelocal clusters and vacancy defects such as voids, graphite inclusion, and hydrogen cluster. Therefore,some important parameters such as methane concentration and substrate temperature should beoptimized in depositing diamond film
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/57/transtech_doi~10.4028%252Fwww.scientific.net%252FKEM.373-374.134.pdf
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