ISSN:
1573-4803
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Abstract Several spectroscopies analysing the composition and chemical nature of thin films (Rutherford backscattering spectrometry, nuclear reaction analysis, secondary ion mass spectroscopy, X-ray photoelectron spectroscopy) were combined with a specially designed technique of X-ray diffraction at grazing incidence on bulk samples, in order to characterize Ti1−x N x films of nearly homogeneous composition obtained by ion implantation at several energies. Differences in the nature of the phases observed, with respect to previous TEM studies on thin foils, are discussed in terms of radiation-enhanced diffusion and of thermal dissipation of the ion-beam power. The distribution of nitrogen atoms, defects and phases as a function of the nitrogen concentration are also correlated with changes in depth profiles of hardness measured by a submicroscopic indentation test.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF01103555
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