ISSN:
1432-0630
Keywords:
PACS: 61.16.Ch; 68.55.-a
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
Notes:
2 O5) thin films, which are good candidates for the realization of gas detectors, have been grown on rough alumina substrates and characterized by atomic force microscopy (AFM). The films were prepared by radiofrequency reactive sputtering, with different concentrations of oxygen in the growth atmosphere; after deposition the samples were thermally treated in order to get the best sensitivity to different gases. Because of the structures already present on the rough alumina substrate, AFM showed large topographical variations (several hundred nanometers) for V2O5 films grown on a rough alumina substrate. For both thermally treated and untreated samples, the roughness increases with increasing percentage of oxygen, but the sample with the best sensing properties (15% of oxygen) shows a characteristic minimum. Moreover, we observe that the thermal treatment also produces a general decrease in roughness, which is especially marked in samples with a low percentage of oxygen. The sensor has been tested with NO2, and the best sensitivity was obtained for an operating temperature around 300 °C.
Type of Medium:
Electronic Resource
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