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  • 11
    Electronic Resource
    Electronic Resource
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 58 (1991), S. 2657-2659 
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Oxygen redistribution near the interface between the epitaxial layer and substrate was monitored with micro-Fourier transform infrared measurements in a transversal wafer cross-section configuration. It has been shown that oxygen contamination of the epitaxial layer may induce the formation of SiO2 precipitates into the film, due to outdiffusion from the substrate. To our knowledge this is the first direct evidence of oxygen precipitation phenomena within the epitaxial layer.
    Type of Medium: Electronic Resource
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  • 12
    Electronic Resource
    Electronic Resource
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 58 (1991), S. 2099-2101 
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Oxygen content in the bulk of Czochralski silicon was analyzed by using micro-Fourier transform infrared spectroscopy in a transversal wafer cross-section configuration. This technique locally distinguishes between interstitial oxygen and oxygen precipitates in wafers used as substrates for epitaxial layer growth. Systematic measurements performed in the 5000–700 cm−1 wavenumber range clearly indicate the presence of oxygen microprecipitates in the bulk of the processed silicon wafers. Quantitative determination of oxygen precipitate density is reported and compared with the measured interstitial oxygen concentration.
    Type of Medium: Electronic Resource
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  • 13
    Electronic Resource
    Electronic Resource
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 57 (1990), S. 1511-1513 
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Oxygen solid-state outdiffusion from the substrate to the epitaxial layer was investigated by using micro-Fourier transform infrared measurements in a transversal wafer cross-section configuration. Interstitial oxygen concentration, obtained by analyzing the 1107 cm−1absorption band, indicated that an oxygen content, clearly detectable by the infrared technique, is present in the epitaxial layer near the interface. To our knowledge this is the first evidence of oxygen outdiffusion from the substrate into the epitaxial layer.
    Type of Medium: Electronic Resource
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  • 14
    Electronic Resource
    Electronic Resource
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 62 (1993), S. 2664-2666 
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Gettering of Cr during the growth of silicon sheets from a Cr-doped melt is observed when the solid/liquid interface region is exposed to CO or CO2 gases. The gettering occurs within a region about 1-μm wide at the surface of the crystal, where a large accumulation of carbon and oxygen is detected. Mechanisms for carbon and oxygen participation in forming gettering sites for Cr are examined.
    Type of Medium: Electronic Resource
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  • 15
    Electronic Resource
    Electronic Resource
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 60 (1992), S. 871-873 
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: High-spatial resolution Fourier transform infrared spectroscopy permitted us to study the effects of incident light polarization on the absorption band related to aggregates of SiO2 disk-shaped precipitates present in annealed (100) Czochralski silicon samples. This is the first report documenting the strong dependence of such a band intensity on light polarization. Experimental results were compared with the simulation obtained using the effective medium theory. From this comparison we deduce that the precipitates only lie on the planes among {100} which are parallel to the wafer surface. This result can be related to the difference between the 〈100〉 direction and those crystallographically equivalent, introduced by the ingot growth process.
    Type of Medium: Electronic Resource
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  • 16
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 67 (1990), S. 2806-2809 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Different doses of iron ions were implanted in Czochralski grown single-crystal silicon samples and subsequently annealed at 1000 °C for 2 h in a dry nitrogen atmosphere. The behavior of the implanted iron and of oxygen already present in the material was monitored. It was found that the existence of the remaining structural disorder after the annealing treatment plays a dominant role in iron and oxygen segregation into the disordered region. This confirms the theory which predicts that the structural disorder and related strain fields are dominant mechanisms for gettering of metallic ions.
    Type of Medium: Electronic Resource
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  • 17
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 67 (1990), S. 3538-3541 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: A Fourier transform infrared study of Fe-donor B-acceptor complexes formed in iron-implanted B-doped Czochralski-grown silicon crystals is performed by monitoring the behavior of boron-acceptor excitation spectrum lines. The effect of the iron presence on absorption spectra due to B-acceptor hydrogenlike systems, related to electronic transitions from the ground to excited states associated with the silicon P3/2 valence band, was analyzed in a wide range of fluences. Low-temperature optical data are reported and discussed comparing optical results with secondary-ion mass spectroscopy and spreading resistance measurements, supporting the existence of a fluence threshold that controls iron diffusion into the bulk.
    Type of Medium: Electronic Resource
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  • 18
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 67 (1990), S. 3393-3399 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: GdSi2 and ErSi2 polycrystalline thin films were studied using electrical resistivity in the temperature range 10–900 K, Hall effect from 10–300 K and reflectivity spectra from 0.2–100 μm at room temperature. Composition and structure in these films were investigated by Rutherford backscattering spectroscopy and x-ray diffraction techniques. These silicides are metallic with (i) a remarkable difference in their residual resistivity, (ii) a phonon contribution to the resistivity which showed a negative deviation linearity, and (iii) low energy interband transitions. Resistivity data indicated that GdSi2 and ErSi2 have a Debye temperature of 328 and 300 K respectively and a limiting resistivity value much higher than that observed in other transition metal disilicides. The charge carrier concentration was estimated to be 4×1021 cm−3 at room temperature according to Hall measurements, and the mean free path was 63 A(ring) and 320 A(ring) for GdSi2 and ErSi2, respectively, at 10 K. The parameters obtained by the optical analysis are in good agreement with those extracted from the transport measurements, thus permitting one to obtain a reasonable value for the Fermi velocity.
    Type of Medium: Electronic Resource
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  • 19
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 74 (1993), S. 2445-2449 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Reflectance and transmittance spectra of p-type InP:Zn samples were measured by Fourier transform infrared spectroscopy (FTIR) in the spectral range from 40 to 700 cm−1. Zn was diffused into InP by an open-tube method, and a subsequent short annealing at different temperatures for the electrical activation of Zn diffused layers was performed. Free-carrier effects on vibrational structures around the restrahlen peak were evidenced. Concentration of electrically active Zn and free-hole damping constant were obtained by fitting reflectance spectra with a classical Drude–Lorentz dielectric function. The results confirmed the model for the electrical activation of the samples, based on outdiffusion of interstitial Zn by thermal annealing.
    Type of Medium: Electronic Resource
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  • 20
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 67 (1990), S. 3102-3106 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The nonparabolicity of the Si conduction band is investigated from the analysis of the optical response of heavily doped samples in the range 1019– 6×1021 cm−3 at 300 K. The data enable us to determine an optical effective mass which is found to exhibit a systematic increase for doping levels above 1020 cm−3. The fitting of experimental results gives a nonparabolicity parameter α=0.27 eV−1, which compares well with less direct estimates provided by the analysis of transport coefficients. The effect of the impurity potential, while providing a significant band tailing of the density of states, is found to have negligible influence on the value of the optical effective mass at the given impurity concentration.
    Type of Medium: Electronic Resource
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