Electronic Resource
[S.l.]
:
American Institute of Physics (AIP)
Review of Scientific Instruments
63 (1992), S. 3525-3526
ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
In order to enhance the utility of pulsed laser deposition, a method to deposit uniform films has been devised. The target and substrate are offset from each other and the substrate is rotated about its axis between laser pulses. We have simulated this process using experimentally determined deposition profiles. Films of uniform thickness to within a few percent across a substrate 5.08 cm in diameter have been fabricated, where we have obtained excellent agreement between theory and experiment.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1143762
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