ISSN:
1573-4803
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Abstract Tantalum oxide films have been deposited on substrates by decomposing Ta(OCH3)5 photolytically in the beam of a KrF excimer laser under various conditions of laser fluence (200–450 J m−2), repetition rate (20–120 Hz), supply rate of Ta(OCH3)5 (50–400 mg h−1) and substrate temperature (403–723 K). The deposits were highly oriented when produced at laser fluences of 350 and 450 J m−2. Their XRD patterns suggested the formation of β-Ta2O5. The (1 1 1 0) planes were preferentially oriented parallel to the substrate surface when produced at lower repetition rates, higher supply rates of Ta(OCH3)5, and lower substrate temperatures; whereas (1 1 1 1) planes were similarly oriented when the conditions were reversed. The preferred orientation may be explained in terms of supersaturation. The deposits produced at a fluence of 200 J m−2 were, however, rather amorphous.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF00570091
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