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  • 1
    Electronic Resource
    Electronic Resource
    Chichester [u.a.] : Wiley-Blackwell
    Surface and Interface Analysis 19 (1992), S. 171-174 
    ISSN: 0142-2421
    Keywords: Chemistry ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Physics
    Notes: We investigate the validity of methods for background correction in XPS by comparing determined peak intensity ratios with theory. For Ag, Pt and Au, peaks are considered for which possible errors in the inelastic electron mean free path and in the energy dependence of the analyser response function have minimal influence on the accuracy of the theoretical ratios. The straight line method gives a root-mean-square (RMS) deviation from theory of ∼34% and ∼60% when the low-energy point is selected to lie close to or far from the main structure of the peak respectively. The Shirley method gives an RMS deviation from theory of ∼35%, with only a small change between two sets of considered energy ranges. The Tougaard method gives an RMS deviation from theory of ∼3%, which is of the order of the expected uncertainty due to the combined effects of the level of the apparatus stability and the errors in the ratios of photo-ionization cross-sections.
    Additional Material: 4 Ill.
    Type of Medium: Electronic Resource
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  • 2
    Electronic Resource
    Electronic Resource
    Chichester [u.a.] : Wiley-Blackwell
    Surface and Interface Analysis 22 (1994), S. 129-133 
    ISSN: 0142-2421
    Keywords: Chemistry ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Physics
    Notes: Quantitative applications of electron spectroscopies, AES and XPS, should be based on theoretical models describing realistically the electron transport in solids. Detailed knowledge of elastic scattering cross-sections due to the elements constituting a given solid is necessary in such calculations. To some extent, such data are available in the literature, but a complete data set in the form of a computer controlled database is not available. An extensive software packet is described in the present article for providing relativistic elastic scattering cross-sections for elements with atomic numbers up to 96. The energy range for each element varies from 50 to 10000 eV in steps of 1 eV. The software packet has the following options: (1) visualization of the differential elastic scattering cross-sections in different coordinate systems; (2) creation of files containing the elastic scattering cross-sections for specified elements, energies, and coordinates; (3) creation of random number generators providing the polar scattering angles to be used in Monte-Carlo simulation of the transport of electrons in solids; and (4) testing the performance of the created random number generators.
    Additional Material: 4 Ill.
    Type of Medium: Electronic Resource
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  • 3
    Electronic Resource
    Electronic Resource
    Chichester [u.a.] : Wiley-Blackwell
    Surface and Interface Analysis 22 (1994), S. 124-128 
    ISSN: 0142-2421
    Keywords: Chemistry ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Physics
    Notes: The dielectric loss function of ZrO2 over 0-80 eV has been determined from a quantitative analysis of reflection electron energy loss spectra (REELS) at different primary energies. From this, the inelastic electron mean free path for 200-2000 eV electrons in ZrO2 has been calculated. The inelastic mean free path (IMPF) is found to depend on the depth from which the electron is backscattered. For great depths, the IMFP approaches a constant value which is the same as that which would be obtained within a model that ignores the effects of the surface. The derived IMFP values have been compared to different formulae presented in the literature and the TPP2 formula due to Tanuma et al. is found to give the best agreement with the present results.
    Additional Material: 4 Ill.
    Type of Medium: Electronic Resource
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  • 4
    Electronic Resource
    Electronic Resource
    Chichester [u.a.] : Wiley-Blackwell
    Surface and Interface Analysis 23 (1995), S. 559-564 
    ISSN: 0142-2421
    Keywords: Chemistry ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Physics
    Notes: Ratios of the experimental XPS peak intensities from seven metals were compared to two first-principle theories corresponding to neglecting and including the effects of elastic electron scattering, i.e. the common formalism and the Monte Carlo model, respectively. The theoretical peak intensities were found to change by an average of 14% as a result of elastic scattering, but the standard deviation from experiment was practically the same, namely ∼15% for both theories. The deviation between experiment and theory is found to be random when elastic scattering is neglected, while a small systematic component is revealed when elastic scattering effects are included. The fact that no general reduction is observed in the deviation between experiment and theory is attributed to the error origination from parameters like the photoionization cross-sections and the inelastic electron mean free paths. These errors apparently overshadow to a large extent the improvements of including the effects of elastic electron scattering.
    Additional Material: 3 Ill.
    Type of Medium: Electronic Resource
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  • 5
    Electronic Resource
    Electronic Resource
    Chichester [u.a.] : Wiley-Blackwell
    Surface and Interface Analysis 25 (1997), S. 688-698 
    ISSN: 0142-2421
    Keywords: Excitation depth distribution function ; Auger electrons ; Monte Carlo calculations ; Universal cross-section ; BASTIN 86 algorithm ; Chemistry ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Physics
    Notes: A theoretical Monte Carlo model for calculations of the excitation depth distribution function (EDDF) defining the distribution of ionizations caused by impact of medium energy electrons has been developed. Within this model, the energy losses are described by the Universal cross-section, which has successfully been applied for peak shape analysis at medium energies. Furthermore, the proposed model accounts for the energy dependence of the differential elastic scattering cross-sections, which may be very pronounced at medium energies. It has been found that the mean range of L3 subshell ionizations in iron at 1250 eV extends only down to ∽40 Å. This result confirms an experimental value found recently from analysis of the Fe L3MM spectral shape. Very good agreement is also observed between experimental and theoretical mean ionization depths obtained at higher energies. The shape of the EDDF closely resembles the shape of the φ(ρz) function used in the formalism of electron probe microanalysis. Similarly with the φ(ρz) function, the EDDF initially increases with depth to reach a maximum and then monotonically decays. The EDDF resulting from the present theoretical model has been compared with the φ(ρz) function derived from the experimental data acquired at much higher energies (BASTIN 86 algorithm). Unexpectedly, this simple formula was in reasonably good agreement with the present calculations in the energy range 1250-4000 eV and for a wide range of atomic numbers. It is concluded that the BASTIN 86 algorithm is a reasonable approximation of the EDDF function for AES. © 1997 by John Wiley & Sons, Ltd.
    Additional Material: 8 Ill.
    Type of Medium: Electronic Resource
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  • 6
    Electronic Resource
    Electronic Resource
    Chichester [u.a.] : Wiley-Blackwell
    Surface and Interface Analysis 26 (1998), S. 17-29 
    ISSN: 0142-2421
    Keywords: Elastic scattering ; peak attenuation ; quantitative surface analysis ; Chemistry ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Physics
    Notes: We define a new parameter to describe the effects of elastic electron scattering in XPS and AES. The parameter is the ratio of emitted intensity from a layer of atoms located at a given depth in a solid calculated from theories that take into account and neglect elastic electron scattering. We have found that the correction parameter can be expressed by a simple formula. This formula is of general validity for typical experimental geometries applied in practical XPS and AES. The formula was determined by fitting an analytical expression to the results of extensive Monte Carlo calculations made under variation in the full relevant range of electron energy, matrix atomic number, depth of origin of emitted electrons and angular emission anisotropy. The formula depends on the inelastic (λi) and the transport (λtr) mean free path for electron scattering. Three assumptions were made in the calculations, namely that the geometry is close to normal emission, that the angle between x-ray source and analyser axis is close to the magic angle (54°) and that the ratio λtr/λi is approximately constant over the analysed depth. However, the result is expected to vary only slightly when these assumptions are not strictly fulfilled. © 1998 John Wiley & Sons, Ltd.
    Additional Material: 9 Ill.
    Type of Medium: Electronic Resource
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  • 7
    Electronic Resource
    Electronic Resource
    Chichester [u.a.] : Wiley-Blackwell
    Surface and Interface Analysis 26 (1998), S. 249-269 
    ISSN: 0142-2421
    Keywords: quantitative surface analysis ; XPS ; AES ; nano-structures ; peak shape analysis ; Chemistry ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Physics
    Notes: The accuracy of XPS and AES quantification by peak shape analysis was established from a detailed analysis of a range of model spectra and three sets of experiments. It was found that information on the concentration-depth profile in the surface region up to depths of ∽5λi (where λi is the inelastic electron mean free path) is primarily contained in the spectral energy region up to ∽100 eV below the peak energy and is essentially completely contained by the energy region up to ∽200 eV below the peak. Analysis of a larger energy range than 100 eV does not add much to the information on the details of the structure in the outermost 5λi but gives the possibility to determine additional structural parameters that describe the composition at larger depths. The structural parameters that describe the chemical composition of the outermost 5-10λi of the solid were divided into primary and secondary parameters: the primary parameters are the three most important parameters needed to describe the main characteristics of the distribution of atoms; the secondary parameters are parameters other than the three primary parameters that describe the finer details of the depth distribution of atoms in the outermost 5-10λi of the surface region. The uncertainty in the determined three primary parameters is typically 5-10%. The uncertainty in the determined secondary parameters is typically ≳35%. Different models of depth profiles can be distinguished when they differ significantly over a width of more than ∽1/3λi at any depth ≲5λi. The uncertainty in the total determined amounts of atoms within the surface region is ∽5-10% as long as the depths are within the primary probing depth of the method (i.e. 〈5λi). The absolute quantification of a set of samples where the in-depth distribution varies considerably gives a root-mean-square scatter of 15%. This is reduced to ∽10% when elastic scattering effects are modelled by a simple analytical expression. © 1998 John Wiley & Sons, Ltd.
    Additional Material: 15 Ill.
    Type of Medium: Electronic Resource
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  • 8
    ISSN: 0142-2421
    Keywords: Chemistry ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Physics
    Notes: A recent method, which contains no adjustable parameters, is used to deconvolute the background intensity of inelastically scattered electrons from the XPS spectrum of silver in the 200-900 eV kinetic energy range. The inelastic background signal is found to match the measured spectrum in the energy regions between peaks. In the deconvoluted spectrum the behaviour on the low energy side of each peak is similar, with a tail of primary electrons extending ∼50 eV below the peak. The range of validity of the deconvolution procedure is discussed.
    Additional Material: 5 Ill.
    Type of Medium: Electronic Resource
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  • 9
    Electronic Resource
    Electronic Resource
    Chichester [u.a.] : Wiley-Blackwell
    Surface and Interface Analysis 13 (1988), S. 225-227 
    ISSN: 0142-2421
    Keywords: Chemistry ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Physics
    Notes: The consistency of a recently proposed algorithm for background correction in XPS is studied, under variation of the XPS peak energy, by use of synchrotron radiation. Two approximations for the inelastic scattering properties of the solid are investigated. Both algorithms are found to account well for the variation in the inelastic scattering properties of the solid when the Au 4f XPS peak energy is varied. Small differences can be ascribed to the influence of surface excitations which are not included in the algorithm.
    Additional Material: 4 Ill.
    Type of Medium: Electronic Resource
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  • 10
    Electronic Resource
    Electronic Resource
    Chichester [u.a.] : Wiley-Blackwell
    Surface and Interface Analysis 14 (1989), S. 730-738 
    ISSN: 0142-2421
    Keywords: Chemistry ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Physics
    Notes: A theory is presented that allows detailed quantitative information on in-depth concentration profiles to be extracted through analysis of surface electron spectra. The depth profile is determined from analysis of a single spectrum and the method is therefore fast and non-destructive. The validity of the method is tested through anlaysis of model spectra from a wide variety of inhomogeneous systems. It is demonstrated that the method can clearly distinguish between different classes of in-depth profiles. Moreover, the formalism can be used to distinguish between different overlayer growth mechanisms. The resolution in the determination of the detailed concentration depth profile is of the order of the inelastic mean free path λ. The accuracy of the total amount of material within depths of 4-6 λ determined by the analysis is, in all cases, better than 10-15%.
    Additional Material: 9 Ill.
    Type of Medium: Electronic Resource
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