ISSN:
1432-0630
Schlagwort(e):
PACS: 79.20D; 42.40E; 85.40U
Quelle:
Springer Online Journal Archives 1860-2000
Thema:
Maschinenbau
,
Physik
Notizen:
Abstract. Relief gratings of 500-nm period have been fabricated on Er/Yb-doped borosilicate glass substrates by laser ablation through the use of an excimer laser, at a wavelength of 193-nm, and a modified Mach–Zehnder interferometer. The grating fabrication process has been quantified by the use of diffraction efficiency measurements and atomic force microscope microscans and is related to the incident energy density.
Materialart:
Digitale Medien
URL:
http://dx.doi.org/10.1007/s003390051519
Permalink