ISSN:
1573-482X
Source:
Springer Online Journal Archives 1860-2000
Topics:
Electrical Engineering, Measurement and Control Technology
,
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Abstract High-density, magnetically enhanced discharges of Cl2/CH4/H2/Ar were shown to provide rapid dry etching of InGaAsP/InP laser structures for sample temperatures of greater than 130
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF01198952
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