ISSN:
1662-9752
Quelle:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Thema:
Maschinenbau
Notizen:
Micropipe density (MPD) is a crucial parameter for silicon carbide (SiC) substratesthat determines the quality, stability and yield of the semiconductor devices built on thesesubstrates. The importance of MPD is underscored by the fact that all existing specifications for6H- and 4H-SiC substrates set upper limits for it. Several methods for measuring the MPD areknown, however, their reliability and applicability to various types of substrates (e.g. semiinsulating,conducting, etc.) has not been systematically studied.The subject of this paper is a comparative study of various techniques used for the MPDmeasurement accompanied by statistical analysis of the results. The study was initiated by severalorganizations working in the immediate field of silicon carbide or in closely related fields andincluded SiC substrate manufacturers, substrate consumers, equipment manufacturers anduniversities. The study represented a round robin experiment in which MPD was measured onthirty SiC wafers of various pedigrees. The values of MPD have been determined using bothdestructive and non-destructive techniques. The repeatability of each technique is analyzed andcompared with that of other techniques
Materialart:
Digitale Medien
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/02/13/transtech_doi~10.4028%252Fwww.scientific.net%252FMSF.527-529.443.pdf
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