ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
The device reported here allows the researcher the opportunity of gaining primitive yield information, threshold voltages, emission stability, and other information, e.g., gas effects, on field emitter arrays (FEA) which are microminiature "vacuum tubes'' fabricated by microelectronic processing methods on silicon wafers, without scribing, dicing, and mounting each device on individual vacuum-compatible headers. This device also speeds up the entire data-acquisition process by requiring only one ultrahigh-vacuum pumpdown and one set of vacuum feedthroughs.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1139275
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