ISSN:
1432-1130
Source:
Springer Online Journal Archives 1860-2000
Topics:
Chemistry and Pharmacology
Notes:
Abstract A method is presented for calculating the absorption spectrum, the film thickness and the index of refraction from IR reflection spectra. Considering real test conditions (partial incoherence, scattering) a routinely usable instrument was created with this direct calculation of the absorption spectrum, which provides a very good correspondence between the measurement and simulation also without any initial information about the expected spectrum. This method is applied to characterize hard coatings deposited on iron substrates by glow discharge assisted CVD processes with organic silicon and boron compounds as precursors. In addition to the qualitative microstructural characterization of these coatings, this method is suitable for a rapid, exact and non-destructive determination of the film thickness and the index of refraction.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/s002160051453
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