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  • 1
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: In this communication we address two issues essential for low-voltage memory applications of ferroelectric thin films: the size effect on polarization switching, and polarization fatigue. According to the proposed concept, both of these phenomena are controlled by local injection of charge into the interfacial layers of the ferroelectric film. In the experimental part of this work, we show that the entrapped charge relaxation can be enhanced by introducing a thin RuO2 layer into the top interface of the Pt/PZT/Pt ferroelectric capacitor. Capacitors prepared in this way using PZT with a 45/55 Zr/Ti ratio show a substantial improvement of fatigue performance and withstand relatively well the thickness downscaling. As a result, these capacitors exhibited good ferroelectric properties for driving voltage amplitudes as low as 0.6–0.8 V. Our results suggest that control of charge relaxation at the interface is a key issue for development of low-voltage ferroelectric capacitors. © 2000 American Institute of Physics.
    Type of Medium: Electronic Resource
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  • 2
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 83 (1998), S. 3835-3841 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The nature and the role of 1 to 5 nm thick TiO2 seed layers for the growth of textured PbTiO3 and Pb(Zr,Ti)O3 thin films on textured Pt(111) thin film substrates have been studied. Under otherwise identical in situ sputter deposition process conditions, the PbTiO3 texture could be turned from (100) to (111) orientation by adding the seed layer. This is demonstrated by patterning the TiO2 film. Auger electron spectroscopy and x-ray photoemission spectroscopy showed that the seed layer was a continuous TiO2 film. X-ray photoelectron diffraction measurements revealed epitaxial ordering in the seed layer. As there is no azimutal order among the Pt grains, the reduced information of azimutally averaged polar cuts is obtained. These give strong evidence for a strained rutile (110) structure. Various deposition experiments indicated that the TiO2 is effective only when it is ordered before the PbTiO3 nucleation starts. The epitaxial relationship between PbTiO3(111) and Pt(111) is thus mediated by the intermediate, epitaxial TiO2 film, which is dissolved or transformed to PbTiO3 afterwards. The observed growth behavior is discussed in terms of surface and interface energies. © 1998 American Institute of Physics.
    Type of Medium: Electronic Resource
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