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  • 1
    Electronic Resource
    Electronic Resource
    Detection of atomic oxygen: Improvement of actinometry and comparison with laser spectroscopy (2000)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 88 (2000), S. 6232-6238 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The density of atomic oxygen in an oxygen rf discharge in the Gaseous Electronics Conference reference cell is determined from the intensity ratios of the argon λ=750 nm line (2p1–1s2) and the atomic oxygen lines λ=777 nm (5P–5S) and λ=844 nm (3P–3S). Laser induced fluorescence spectroscopy with two-photon excitation is applied to the oxygen plasma, and the results of both methods are compared. The improved actinometry is based on the calculation of electronic collisional excitation of the upper levels of these transitions. The required information on the electron energy distribution function is obtained from a model calculation of the discharge. Good agreement of the results are obtained, if excitations via dissociative channels and also quenching rates are accounted for. © 2000 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1315332
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  • 2
    Electronic Resource
    Electronic Resource
    Investigation of the expanding plasma of an anodic vacuum arc (1990)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 67 (1990), S. 3625-3629 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: An aluminum plasma is produced by an anodic vacuum arc (25 A, 17 V) with a consumable anode. The plasma expands from the anode to the walls and is investigated by Langmuir probes, a quadrupole mass spectrometer, a retarding field ion energy analyzer, and a quartz-crystal oscillator for mass flow detection. The electron density ranges within 2×1015–3×1017 m−3 and the electron temperature within 0.4–0.9 eV. At a target, ion fluxes of 1.5×1019–8×1020 m−2 s−1 and total particle fluxes of 3×1020–4×1021 m−2 s−1 are measured. The ions are accelerated in the expanding plasma towards the target and gain a few eV. By a simple collisionless transport model of the expanding plasma, the plasma potential and floating potential are calculated and compared with experimental data.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.345315
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  • 3
    Electronic Resource
    Electronic Resource
    Attachment-induced ionization instability of a radio frequency excited discharge in oxygen (1999)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 75 (1999), S. 2023-2025 
    Details
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The plasma of a 13.56 MHz capacitively coupled oxygen discharge of the Gaseous Electronics Conference Reference Cell type exhibits fluctuations of the plasma potential and of light emission in the kilohertz range. This behavior can be explained in terms of an attachment-induced ionization instability in connection with a sufficiently high fraction of negative ions. A necessary condition for the appearance of this type of instability is a strong positive dependence on electron temperature of the electron attachment coefficient describing the formation of negative oxygen ions. A strong volume loss of negative ions by neutral particles—metastable molecules in the present case—is an additional condition. Calculations of the temperature dependent coefficients for ionization and attachment by solving the time-independent Boltzmann equation in the two-term approximation in combination with the fluid equations of the charge carriers show that the criteria for the development of an attachment-induced ionization instability are fulfilled in the pressure domain around 30 Pa and for medium radio frequency voltages around 300 V. © 1999 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.124903
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