ISSN:
1013-9826
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Thick films are needed in micro-electro-mechanical systems (MEMS) as insulation,piezoelectric and ferroelectric materials. To form the thick film, powder jet deposition (PJD) methodhas been proposed. In the PJD process, microparticles are sprayed out from nozzle under theconditions of room temperature and atmospheric pressure, and make a film on the substrate. We havedeveloped a new jet mechanism of double-nozzle type, and reported its results previously [1]. In thisstudy, we optimized the shape of the nozzle through investigating the influence of differentdimensions and shape of the nozzle on the particles blasting velocity. As a result, it is found thatnozzle diameter has a large affect on particles velocity
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/57/transtech_doi~10.4028%252Fwww.scientific.net%252FKEM.389-390.398.pdf
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