Electronic Resource
[S.l.]
:
American Institute of Physics (AIP)
Journal of Applied Physics
86 (1999), S. 6342-6350
ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
Inorganic contaminants in the fabrication of LiNbO3 optical waveguide devices are examined with regard to their effect on the ultimate device performance and quality. We find a possibility that some chemicals such as a photoresist developer, etc., leave contaminants including silicon and alkalis on the LiNbO3 wafer, and result in an increase of light propagation loss, a pealing of the SiO2 layer from the wafer, and a large dc drift. © 1999 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.371696
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