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  • 1
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 78 (1995), S. 1297-1302 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Coherent anti-Stokes Raman scattering (CARS) is applied to a microwave (2.45 GHz) excited plasma used for plasma enhanced chemical vapor deposition. The applicability of CARS to low pressure (2 Pa) plasmas is verified, and the absence of saturation is carefully checked. Ground state concentration profiles as well as rotational temperatures of CH4 are presented with high spatial and temporal resolution. The measurements show a decrease of the CH4 ground state density under the influence of the plasma down to ≈25% (nCH4=1.0×1020 m−3) of its initial value. The rotational temperature is nearby room temperature across the total discharge volume. A straightforward modeling of the plasma explains the decrease of CH4 ground state densities as an effect of electron collisions and delivers an approximate value of the electron temperature of about 3 eV. © 1995 American Institute of Physics.
    Type of Medium: Electronic Resource
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  • 2
    ISSN: 1432-0649
    Keywords: PACS:33.50D; 42.65C; 81.15H
    Source: Springer Online Journal Archives 1860-2000
    Topics: Physics
    Notes: Abstract. Resonance enhanced CARS and LIF have been applied to the CH radicals in a microwave excited Ar/H $_2$ /CH $_4$ plasma ( $p = 21$ Pa, $P_{\rm Mikro} = 2.7$ kW). Both techniques yield similar nonthermal rotational population distributions of CH(X $^2\Pi_r$ ) in its vibrational ground state ( $v=0$ ), which can be described by two rotational temperatures, $T_{\rm rot,1} \approx 600$ K being in the order of the gas temperature for rotational states with $N \le 7$ , and a considerably higher $T_{\rm rot,2}$ for the higher rotational states. This result is in good agreement with previous resonance CARS and LIF measurements in similar plasmas. With resonance CARS additional measurements on CH in the $v=1$ state could be performed yielding a vibrational temperature of 2440 K, the total CH density was about $1.6 \times 10^{18}$ m $^{-3}$ . The detection limits of both techniques are determined, in our case about $2 \times 10^8$ CH radicals per quantum state in the detection volume, and their advantages and disadvantages are discussed.
    Type of Medium: Electronic Resource
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  • 3
    Electronic Resource
    Electronic Resource
    Springer
    Plasma chemistry and plasma processing 19 (1999), S. 91-109 
    ISSN: 1572-8986
    Keywords: Microwave plasma ; CARS on methyl ; methane ; hydrogen ; modeling, methane plasma ; electron energy distribution function
    Source: Springer Online Journal Archives 1860-2000
    Topics: Chemistry and Pharmacology , Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Technology
    Notes: Abstract Coherent anti-Stokes Raman scattering (CARS) carried out using the BOXCARS technique is applied to quantify the density and temperature of hydrogen, methane, and methyl in a process plasma generated by a surfatron in the pressure range from 30 to 3000 Pa. Below approximately 500 Pa all species and their temperatures have a flat distribution dominated by diffusive processes. At higher pressure the plasma localizes near the inner surface of the surfatron tube. A strong depletion of the methane ground state density is observed, where the gas temperature remains at 400 K on a moderate level. On the other side the methyl density is high at the position of high methane depletion. The measured methyl density is a factor of 200 lower than the methane density, in contrast to the factor 10–20 often reported in the literature. The measured data can be interpreted by proper modeling by means of the Boltzmann equation of electrons, balancing of chemical reactions and diffusive processes. The calculated methane and methyl densities agree with the measured ones only if the electron temperature is assumed to be near 1 eV and thus much lower than predicted in previous papers.
    Type of Medium: Electronic Resource
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