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  • 1
    Electronic Resource
    Electronic Resource
    Plasma production via laser-induced photoemission (abstract) : Proceedings of the 6th international conference on in sources (1996)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 67 (1996), S. 1340-1340 
    Details
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: The feasibility of laser-induced photoemission as a driving mechanism for short plasma pulse production is currently being investigated with a pulsed excimer laser at 248 nm. Low work function materials such as LaB6 and barium are used as cathode materials and the resulting plasma characteristics are being examined. Results from early measurements of the barium photocathode show a strong dependence of the photoemitted current on the source pressure and cathode voltage. Additionally, the temporal behavior of the emitted electron pulse is found to consist of two components: a short 50 ns burst corresponding to laser-induced photoemission, and a larger, longer 100 ns pulse increasing from the tail end of the photoemitted electron pulse. © 1996 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1147244
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    Paper (German National Licenses)
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  • 2
    Electronic Resource
    Electronic Resource
    Small radio frequency driven multicusp ion source for positive hydrogen ion beam production : Proceedings of the 5th international conference on ion sources (1994)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 65 (1994), S. 1186-1188 
    Details
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: A compact, 2.5 cm diam rf-driven multicusp ion source has been developed and tested for H+ ion production in pulse mode operation. The source is optimized for atomic hydrogen ion species and extractable current. It is found that hydrogen ion beam current densities in excess of 650 mA/cm2 can be achieved with H+ species above 80%. The geometry and position of the porcelain-coated copper antenna were found to be of great significance in relation to the efficiency of the ion source.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1145052
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  • 3
    Electronic Resource
    Electronic Resource
    Quartz antenna for radio frequency ion source operation : Proceedings of the 7th international conference on ion sources (1998)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 69 (1998), S. 1023-1025 
    Details
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: Radio-frequency (rf) driven multicusp ion sources developed at the Lawrence Berkeley National Laboratory use an internal induction coil (antenna) for plasma generation. The copper rf-antenna with a thin layer of porcelain coating, which is presently used, cannot fully satisfy the increasing demands on source cleanliness and antenna lifetime under high power cw or pulsed operation in applications where water cooling is not possible. A quartz antenna has been designed and operated in the multicusp ion source. It has been demonstrated that the overall performance of the new antenna exceeds that of the regular porcelain-coated antenna. It can be operated with a long lifetime in different discharge plasmas. The quartz antenna has also been tested at the Paul Scherrer Institute for cw source operation at rf power higher than 5 kW. Results demonstrated that the antenna can survive under dense plasma discharge operations. © 1998 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1148708
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  • 4
    Electronic Resource
    Electronic Resource
    Ion energy spread and current measurements of the rf-driven multicusp ion source (1997)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 68 (1997), S. 1398-1402 
    Details
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: Axial energy spread and useful beam current of positive ion beams have been carried out using a radio frequency (rf)-driven multicusp ion source. Operating the source with a 13.56 MHz induction discharge, the axial energy spread is found to be approximately 3.2 eV. The extractable beam current of the rf-driven source is found to be comparable to that of filament-discharge sources. With a 0.6 mm diameter extraction aperture, a positive hydrogen ion beam current density of 80 mA/cm2 can be obtained at a rf input power of 2.5 kW. The expected source lifetime is much longer than that of filament discharges. © 1997 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1147948
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  • 5
    Electronic Resource
    Electronic Resource
    Plasma production via laser-induced photoemissiona) (1996)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 67 (1996), S. 1666-1669 
    Details
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: The feasibility of laser-induced photoemission as a driving mechanism for short plasma pulse production is currently being investigated with a pulsed excimer laser at 248 nm. Low work function materials such as LaB6 and barium are used as cathode materials and the resulting plasma characteristics are being examined. Results from early measurements of the barium photocathode show a strong dependence of the photoemitted current on the source pressure and cathode voltage. Additionally, the temporal behavior of the emitted electron pulse is found to consist of two components: a short 50 ns burst corresponding to laser-induced photoemission, and a larger, longer 100 ns pulse increasing from the tail end of the photoemitted electron pulse. © 1996 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1146913
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    Paper (German National Licenses)
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  • 6
    Electronic Resource
    Electronic Resource
    Photoemission starting of induction rf-driven multicusp ion sources (1996)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 67 (1996), S. 428-430 
    Details
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: It has been demonstrated that pulsed and continuous wave, rf-driven hydrogen discharges can be started with photoemission. The extracted H− current from a photoemission-started plasma has been investigated and does not differ significantly from that of a filament-started plasma. The minimum pressure for photoemissive starting was found to be higher than that of filament starting, 17 mTorr compared to 7 mTorr, respectively, in this particular configuration. © 1996 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1146608
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  • 7
    Electronic Resource
    Electronic Resource
    Performance characterization of rf-driven multicusp ion sources : Proceedings of the 6th international conference on ion sources (1996)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 67 (1996), S. 1057-1059 
    Details
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: Radio-frequency (rf)-driven multicusp ion sources have been developed extensively at Lawrence Berkeley National Laboratory (LBNL) for many applications, each requiring specific source designs. These uses have ranged from large ion sources for neutral-beam injectors—several tens of centimeters in size—to small sources for oil-well logging neutron tubes—a few centimeters in diameter. The advantages associated with internal antenna, rf-driven ion sources include reliability, long component life, ease of operation, and the ability to generate plasmas free of the impurities commonly found in hot-filament discharge sources. We have investigated and characterized the performance of rf-driven sources with respect to the rf operating frequency and ion source size for hydrogen ion species and current density. Furthermore, we have included in this study the aspects of proper coupling of the rf generator to the antenna through an impedance matching network. Finally, critical issues pertaining to general rf operation including beam extraction, rf shielding, and cooling of transformer cores are discussed.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1146757
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  • 8
    Electronic Resource
    Electronic Resource
    Beam emittance measurements on multicusp ion sources : Proceedings of the 6th international conference on ion sources (1996)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 67 (1996), S. 1249-1251 
    Details
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: Multicusp ion sources are used for various applications. Presently, the implementation of this type of ion source is planned for the development of an ion beam lithography machine, which will be used for the projection of sub-0.2 μm patterns onto a wafer substrate. Since, for this application, a very good beam quality and a small ion energy spread are required, emittance measurements have been performed on a multicusp ion source for various source conditions. It is shown that the installation of proper capacitors between the extraction electrodes is necessary to avoid rf pickup, which otherwise leads to a distortion of the beam emittance. The influence of the magnetic filter field on the beam emittance has been investigated, and the beam emittance of a dc filament-discharge plasma has also been compared to that of a rf-generated plasma. © 1996 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1146688
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  • 9
    Electronic Resource
    Electronic Resource
    Technique for the removal of electrons from an extracted, pulsed, H− ion beam (1996)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 67 (1996), S. 3497-3500 
    Details
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: A small, permanent-magnet insert structure for the removal of electrons from pulsed, extracted, negative ion beams has been developed at Lawrence Berkeley National Laboratory. The device was computer modeled and designed for an extraction field strength of 3 kV/mm. The testing was carried out with a rf driven multicusp ion source optimized for the production of H− ions and pulsed at a few Hz with pulse widths of several hundreds of μs. It is demonstrated that the insert structure together with a collar can remove over 98% of electrons from the extracted H− ion beam without any significant deterioration of the H− ion output. Application to other negative ion beams can be expected from this magnetic collar insert. © 1996 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1147166
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