ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
We have used secondary ion mass spectrometry, local vibrational mode infrared absorption, and electrical characterization to study the incorporation of Si delta-doped planes in GaAs grown by molecular beam epitaxy at 400 °C, in the concentration range 0.01–0.5 monolayers. A correspondence is observed between the density of SiGa donors, the free electron concentration and the total Si coverage, up to a coverage of ∼1013 cm−2; however, above this value, the electron density falls, while [SiGa] remains constant up to a coverage of ∼1014 cm−2, and then falls below the detection limit at 0.5 monolayer coverage. These effects have been interpreted in terms of a model which takes account of Si migration and aggregation on the delta-doped plane during deposition.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.353374
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