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  • 1
    Electronic Resource
    Electronic Resource
    Flexural plate wave resonator excited with Lorentz forces (1998)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 83 (1998), S. 4589-4601 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: A flexural plate wave resonator was constructed by patterning current lines on a silicon nitride membrane suspended on a rectangular silicon frame. Eigenmodes of the rectangular membrane were excited using Lorentz forces generated between alternating surface currents and a static in-plane magnetic field. Preferential coupling to a particular membrane mode was achieved by positioning current lines along longitudinal mode antinodes. An equivalent-circuit model was derived which characterizes the input impedance of a one-port device and the transmission response of a two-port device over a range of frequencies near a single membrane resonance. Experiments were performed to characterize the device's response to changes in dc magnetic field strength, ambient gas composition, gas pressure, and input power. © 1998 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.367242
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    Paper (German National Licenses)
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  • 2
    Electronic Resource
    Electronic Resource
    Pressure sensing with a flexural plate wave resonator (1999)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 85 (1999), S. 1998-2000 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: A silicon nitride membrane supported on a silicon substrate and having a sealed air cavity underneath has been used as a pressure sensor. Membrane resonances are excited and detected using conductor lines patterned on the membrane in combination with an applied magnetic field. The resonant frequency depends strongly upon membrane tension and thus the differential pressure across the membrane. © 1999 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.369196
    Library Location Call Number Volume/Issue/Year Availability
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    Paper (German National Licenses)
    Fulltext
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