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A new two-dimensional particle detector for a toroidal electrostatic analyzer (1991)

Tromp, R. M. ; Copel, M. ; Reuter, M. C. ; [et al.]

[S.l.] : American Institute of Physics (AIP)

Review of Scientific Instruments 62 (1991), S. 2679-2683

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ISSN: 1089-7623

Source: AIP Digital Archive

Topics: Physics , Electrical Engineering, Measurement and Control Technology

Notes: We describe a new two-dimensional detector for the detection of ions scattered from a solid target, analyzed in energy and scattering angle by a toroidal electrostatic analyzer. The detector resolves the scattering angle with a resolution of 0.4° over a range of 25°, and the ion energy with a resolution of 120 eV over a range of 2000 eV, at 100 keV ion energy. The energy resolution of the spectrometer was improved with a factor 4 relative to its previous performance with a one-dimensional scattering angle detector, while−at the same time−the dose efficiency (count/μC) was improved by a factor 5–10.

Type of Medium: Electronic Resource

URL: http://dx.doi.org/10.1063/1.1142199

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