Digitale Medien
s.l. ; Stafa-Zurich, Switzerland
Materials science forum
Vol. 600-603 (Sept. 2008), p. 377-380
ISSN:
1662-9752
Quelle:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Thema:
Maschinenbau
Notizen:
We report an experimental investigation of the pits formed at oxidation. The pits wereformed by a long time oxidation in a dry or wet atmosphere at high temperature (~ 1200 oC).Although they were observed in (0001) face, they were not in (000-1) face. Comparing the points ofoxidation pits to those of molten KOH etching pits on the same area of the substrate, we show thatthe oxidation pits are formed by oxidizing defects. In addition, the influence of the oxidation pits tothe reliability of thermal oxide was researched
Materialart:
Digitale Medien
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/02/20/transtech_doi~10.4028%252Fwww.scientific.net%252FMSF.600-603.377.pdf
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