ISSN:
1432-0630
Keywords:
61.80.−j
;
68.48.
;
79.20.−m
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
Notes:
Abstract Thin titanium nitride films of 10–300 nm thickness were irradiated with 84Kr ions of 80–700 keV energy and fluences ranging from 1016 cm2 to 2×1017 cm2. Sputter yields (Y=0.4–1.0) and mixing rates (k=0.05–0.5 nm4) were determined using the depth profiling methods RBS, RNRA, and PIXE. While the sputter yields agree well with the modified Sigmund theory, the energy dependence of the mixing rates cannot be explained by standard models.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF00324738
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