ISSN:
1573-4803
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Abstract Laser evaporationin vacuo has been used to prepare ceramic coatings on single-crystal silicon wafers from sintered Mg2SiO4 targets. The morphology of the coatings resembles that of other coatings prepared by arc-source ion plating, while preliminary secondary ion mass spectrometry (SIMS) analysis indicates that the coatings have a higher silicon content relative to the target material.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF01160788
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