ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
Using a calibrated 3 m grazing incidence spectrometer-type Romand Vodar equipped with channel plates detector, we studied emission lines in the range between 10 and 100 nm of ions from plasma generated in two different electron cyclotron resonance ion sources (the new CAPRICE and QUADRUMAFIOS). In the VUV range, one can observe many emission lines from nearly all ionization states. From the measurements, performed on oxygen and helium mixture plasmas and thanks to a theoretical model, an estimation is done giving the electronic and ionic densities for different rf powers. © 1996 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1146691
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