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  • 1
    Digitale Medien
    Digitale Medien
    Lamb wave devices using capacitive micromachined ultrasonic transducers (2001)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 78 (2001), S. 111-113 
    Details
    ISSN: 1077-3118
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: Lamb wave devices based on capacitive micromachined ultrasonic transducers (CMUTs) have been built on 500-μm-thick silicon wafers for frequencies in the vicinity of 1 MHz. CMUTs have been used to both excite and detect Lamb waves in the substrate. This configuration eliminates the need for piezoelectric materials, which are not compatible with the existing integrated circuit (IC) fabrication techniques, and allows easy integration of Lamb wave devices and electronics on the same wafer. Finite element analysis of the devices shows that the lowest order antisymmetric Lamb wave (A0) is the dominant mode in the substrate in this frequency range. This result is also confirmed by demonstration experiments. © 2001 American Institute of Physics.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.1337647
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  • 2
    Digitale Medien
    Digitale Medien
    A sensitive detection method for capacitive ultrasonic transducers (1998)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 72 (1998), S. 2957-2959 
    Details
    ISSN: 1077-3118
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: We report a sensitive detection method for capacitive ultrasonic transducers. Detection experiments at 1.6 MHz reveal a minimum detectable displacement around 2.5×10−4 Å/Hz. The devices are fabricated on silicon using surface micromachining techniques. We made use of microwave circuit considerations to obtain a good displacement sensitivity. Our method also eliminates the dependence of the sensitivity on the ultrasound frequency, allowing the method to be used at low audio frequency and static displacement sensing applications. © 1998 American Institute of Physics.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.121506
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