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Digitale Medien

A Monte Carlo simulation model for plasma source ion implantation (1993)

Wang, Dezhen ; Ma, Tengcai ; Gong, Ye

[S.l.] : American Institute of Physics (AIP)

Journal of Applied Physics 73 (1993), S. 4171-4175

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ISSN: 1089-7550

Quelle: AIP Digital Archive

Thema: Physik

Notizen: Plasma source ion implantation is a process in which a target is immersed in a plasma and a series of large negative-voltage pulses are applied to it to extract ions from the plasma and implant them into the target. A Monte Carlo simulation model is developed to study the energy and angle distributions of ions at the planar target for higher pressures of the neutral gas. Cross sections of the charge exchange and momentum transfer that depend on the ion energy are taken into account precisely. The energy and angle distributions of N2+ at the target during the sheath edge evolution for the different pressures are determined.

Materialart: Digitale Medien

URL: http://dx.doi.org/10.1063/1.352851

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2

Digitale Medien

Analysis of the effect of external gas flow on helical instabilities of arc plasmas (2001)

Gong, Ye ; Lü, Wenyan ; Liu, Jinyuan ; [weitere]

[S.l.] : American Institute of Physics (AIP)

Physics of Plasmas 8 (2001), S. 3833-3837

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ISSN: 1089-7674

Quelle: AIP Digital Archive

Thema: Physik

Notizen: The effect of external gas flow on helical instability of arcs is studied by using an analytical method. The magnetohydrodynamic equations in an electrostatic approximation serve as the starting point of the theory. Using a linear time-dependent perturbation theory, the analytic expression that corresponds to the term of a gas flow stabilizing effect is deduced, and the growth rate of the helical instability is given. It is found that in the short wavelength perturbation case, the effect of external gas flow is large, so it is beneficial for stabilizing arcs. However, its effect is very small for intermediate and long wavelength perturbations. At the same time, numerical results show that the stabilizing effect of the flow on helical instability increases with increasing shear viscosity of external gas flow. © 2001 American Institute of Physics.

Materialart: Digitale Medien

URL: http://dx.doi.org/10.1063/1.1379343

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3

Digitale Medien

An electrostatic magnetohydrodynamics theory for resistive-viscous helical instabilities of arc discharges (1997)

Wang, Xiaogang ; Liu, Jinyuan ; Gong, Ye ; [weitere]

[S.l.] : American Institute of Physics (AIP)

Physics of Plasmas 4 (1997), S. 2791-2797

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ISSN: 1089-7674

Quelle: AIP Digital Archive

Thema: Physik

Notizen: A simplified linear analysis for resistive-viscous magnetic helical instabilities of arc discharges in a cylindrical plasma is developed. Based on a set of electrostatic magnetohydrodynamic (MHD) equations, resistive-viscous m=1 modes with an external axial magnetic field are studied. Explicit analytic results are obtained, from which the growth rate and the stability criterion can be shown, and the electrostatic assumption can be justified. In comparison with the previous channel model calculations, this analytic treatment can provide a simplified model for instability estimates, while avoiding artificial assumptions and misorderings in the energy equation. © 1997 American Institute of Physics.

Materialart: Digitale Medien

URL: http://dx.doi.org/10.1063/1.872411

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