ISSN:
0032-3888
Keywords:
Chemistry
;
Chemical Engineering
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Chemistry and Pharmacology
,
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
Notes:
A negative deep UV resist, XP 8843 (Shipley Co.),Since this paper was written the name of this resist has been changed from XP 8843 to SNR 248-10. has been made positive by the addition of 1,2,4-triazole. This is achieved by exposing the resist in the presence of the additive thereby inhibiting the crosslinking reaction. After exposure the additive is removed by heating under a vacuum. Unexposed areas of the resist may then be exposed and the resist crosslinked under normal processing conditions.
Additional Material:
16 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/pen.760302104
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