ISSN:
1013-9826
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
FIB equipment has the ability to perform etching and chemical vapor depositionsimultaneously. It is very advantageously used to fabricate micro structure components having 3Dshape because it has a minimum beam size of Φ 10nm and smaller. Currently, FIB technology hasbeen studied the research fields relating to two problems such as low accuracy and low productivitydue to redeposition and a charging effect.This paper focuses on applying FIB technology to the field of micro mold fabrication and repair. Assuch, the simple micro pattern fabrication techniques and the experimental characteristics arestudied on FIB-CVD according to ion beam condition and scanning area.We have encountered some remarks that the result of the experiments according to beam current of8 pA, shows superior CVD yield. But the result of 1318 pA shows the pattern etched off.Furthermore, we also analyzed the scanning area effect for FIB-CVD yield and suggest themaximum yield condition of the chemical vapor deposition for micro part fabrication
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/52/transtech_doi~10.4028%252Fwww.scientific.net%252FKEM.329.649.pdf
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