ISSN:
1022-1352
Keywords:
Chemistry
;
Polymer and Materials Science
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Chemistry and Pharmacology
,
Physics
Notes:
Copolymers of 2-(3-methacryloyloxypropyl)-4,5-diphenyl-1,3-oxazole with N-isopropylacrylamide are used as positive-working photoresists. The change of solubility is induced by the dye-sensitized photooxidation of oxazole rings into the corresponding N,N-dibenzoylcarboxamide and subsequent development in aqueous ethanolamine solution. We propose here a novel procedure to result in a marked amplification of oxazole ring photooxidation by reaching the tricarboxamide photoproduct with an ionizable amino derivative, dyeing with an ionic photosensitizer, exposing to flood light and finally developing the photo-image.
Additional Material:
6 Ill.
Type of Medium:
Electronic Resource
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