ISSN:
1662-9752
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Interests on the fabrication of microfluidic devices have increased in the fields of micrototal analysis system (μ-TAS) and MEMS (Microelectromechanical systems) due to their chemicalinertness and high thermal stability. The thermal characterization of the SiCN preceramic polymer,polyvinylsilazane, showed that the cured polymer has ceramic properties at heat treatmenttemperature of 600 oC or above. In the characterization of the mechanical properties, the characteristicvalues of the elastic modulus and hardness notably increased for the heat-treated SiCN. The presentstudy describes the preparation of nano-sized patterns and microfluidic channels using a softlithographic technique. The study shows that the fabrication of microchannels using the curedinorganic polymers holds tremendous potential in the field of microfluidics, where materials withhigh optical transparency, thermal stability and chemical inertness are in demand as niche betweenconventional microfluidics using glass and polymeric materials
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/02/15/transtech_doi~10.4028%252Fwww.scientific.net%252FMSF.544-545.677.pdf
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